Planarization Equipment (Polishing System)
Designed for horizontal processing of soft materials such as metals and polymer adhesives, achieving high-precision surface flatness and enabling more advanced additive structures.

Product Highlights

• Semi-automatic KL-M series / Fully automatic KL-A series

• Compatible with various substrate or wafer sizes (8”, 12”)

• Specialized in horizontal processing for soft materials

• High-precision flatness control

• Enables exposure of embedded structures